采用MOD工艺制备了PZT薄膜，利用XRD和TEM研究了焦绿石相向钙钛矿相的转变过程．制备在Pt／Ti／SiO2／Si衬底上的PZT薄膜，其XRD分析显示焦绿石相在600℃完全转变为钙钛矿相；与之相比，Pt箔上无支持的PZT薄膜，其TBM分析表明PZT焦绿石相完全转变为钙钛矿相的温度更高，且与薄膜的厚度有关．XPS研究表明，薄膜表面含有化学吸附氧和污染碳，无其它杂质存在.表面富含少量Pb，其Zr／Ti比与化学计量比一致，但晶格中缺氧．
PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformation from pyrochlore to perovskite was studied by XRD and TEM.
XRD analysis showed that pyrochlore phase transformes into perovskite phase fully above 600℃for the PZT thin films on Pt/Ti/SiO2/Si
substrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foil with many microholes, that the transforming
temperature from pyrochlore to perovskite is much higher, and the temperature is related to the thickness of thin films. The surface
states of MOD derived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with whole and narrow scanning
measurement. The results showed that there are chemical-absorbed oxygen and contamination of carbon in the film surfaces which came
from sample handling or pumping oil. Other impurity could not be detected. The films have a little Pb-rich in the surface and a
stoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.
参考文献
| [1] | Scott J F, Araujo C A. Science, 1989, 246: 1400--1405 2 罗维根, 丁爱丽(LUO Wei-Gen, et al). 无机材料学报(Journal of Inorganic Materials), 1996, 11 (1): 19--22 3 包定华, 张良莹, 姚熹. 高技术通讯, 1997, 7 (4): 58--62 4 Xiao D Q, Xiao Z L, Zhu J M, et al. Appl. Phys. Lett., 1991, 58: 36--38 5 Sayer M. Proc. 6th IEEE ISAF, In: Smith W ed. 1986. 560--563 6 Bursill L A, Brooks K G. J. Appl. Phys., 1994, 75 (9): 4501--4509 7 Seraphin S, Zhou D, Teowee G, et al. Mat. Res. Soc. Symp. Proc., 1993, 310: 369--374 8 Chang J F, Desu S B. J. Mater. Res., 1994, 9 (4): 955--969 9 Kaushik V, Maniar P, Campbell A. Mat. Res. Soc. Symp. Proc., 1993, 310: 209--214 10 Krupanidhi S B, Hu H, Kumer V. J. Appl. Phys., 1992, 71: 376--388 11 Ibuki S, Nakayawa T, Okuyama M, et al. Jpn. J. Appl. Phys., 1990, 29: 532--535 12 Dana S S, Etzold K F, Clabes J. J. Appl. Phys., 1991, 69: 4398--4403 13 包定华, 张良莹, 姚熹. 硅酸盐学报(已录用) 14 熊四辈. 西安交通大学博士学位论文, 1994 15 刘世宏, 王当憨, 潘承璜. X射线光电子能谱分析. 科学出版社, 1988. 93--95 16 Hu H, Peng C J, Krupanidhi S B. Thin Solid Films, 1993, 223: 327--333 17 Griswold E M, Weaver L, Sayer M, et al. J. Mater. Res., 1995, 10 (12): 3149--3159 18 Dang E K F, Gooding R J. Phys. Rev. Lett., 1995, 74: 3848--3851 19 Lu C J, Ren S B, Shen H M, et al. J. Vac. Sci. Technol.(A), 1997, 15 (4): 2167--2172 20 Kaufherr N, Eichorst D J, Payne D A. J. Vac. Sci. Technol.(A), 1996, 14 (2): 299--305 21 Fujisaki Y, Torii T, Hiratani M, et al. Appl. Surf. Sci., 1997, 108: 365--369 22 Yamamura M, Kawahara T, Makita T, et al. Jpn. J. Appl. Phys., 1996, 35: 729--735 23 Mukhopadhyay S M, Chen T C S. J. Mater. Res., 1995, 10 (6): 1502--1507 24 Murata M, Wakino K, Ikeda K. J. Electron Spectrosc. Relat. Phenom., 1975, 6: 459--464 25 Qian Z H, Xiao Z L, Zhu J G, et al. J. Appl. Phys., 1993, 74 (1): 224--227 |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%