新型功能材料及器件向小型化,集成化和复合化发展的趋势,使得尺寸在纳米尺度的层状材料和柔性多层器件在使用过程中的服役行为成为其发展的关键科学问题。本文结合作者近几年对Ag/M系列和Cu/M系列多层膜力学性能的研究工作,对金属纳米多层膜的微结构特征及其对力学性能的影响进行了回顾和总结,主要包括多层膜的晶粒形貌对其强化机制和塑性变形行为的影响,组元强度错配对多层膜硬化行为的影响,界面结构与其强度极值的关系、不对称界面结构引起的异常弹性模量增强和多层膜的室温蠕变机制及界面结构埘蠕变性能的影响等几个方面,并对多层膜的力学性能研究进行了展望。
The tendency of new tunc, tional materials and devices to being miniature, integrated and laminated makes the mechanical behavior of those materials in nano scale a key scientific issue for the development of the multilayers and de- vices. Recent researches and developments on the mechanical properties of nanoscale metallic multilayers were summa- rized and introduced in this article based on our own works on Ag/M and Cu/M muhilayers, including issues related to the influence of grain morphology on strengthening mechanisms and plastic deformation behavior, the effects of strength mismatch of component elements on hardness enhancement, the correlation between inteffacial structure and strength maxi- mum value, abnormal modulus enhancement caused by asymmetrical interfacial structure, rooin temperature creep mecha- nisms and the influence of the inteffacial structure on the creep behavior. Meanwhile, the future research on metallic mul- tilayers was also discussed.
参考文献
[1] | Chu]P;Wang Y C .Sputter-Depnsi~ed Cu/Cu(O)Multilayers Exhibiting Enhanced Strength and Tunable Modulus[J].Acta Materialia,2010,58(19):6371-6378. |
[2] | DiBenedetto S A;Facchetti A;Ratner M A et al.Molecular Self- Assembled Monolayers and Muhilayers for Organic and Unconven- tional Inorganic Thin-Film Transistor Applications[J].Advanced Materials,2009,2l(14 -15):l407-l433. |
[3] | Zhang, J.Y.;Zhang, X.;Liu, G.;Zhang, G.J.;Sun, J. .Dominant factor controlling the fracture mode in nanostructured Cu/Cr multilayer films[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2011(6):2982-2987. |
[4] | A. Misra;H. Kung .Preface to the viewpoint set on: deformation and stability of nanoscale metallic multilayers[J].Scripta materialia,2004(6):707-710. |
[5] | Henein G E;Hilliard J E .Elastic-Modulus in Composition-Modu- lated Silver-Palladium and Copper-Goht Foils[J].Journal of Applied Physics,1983,54(02):728-733. |
[6] | Hultman L;Engstrmn C;Oden M .Mechanical and Thermal Sta- bility of TiN/NbN Superlattiee Thin Films[J].Surface and Coatings Technology,2000,133:227-233. |
[7] | W. S. Lai;M. J. Yang .Observation of largely enhanced hardness in nanomultilayers of the Ag-Nb system with positive enthalpy of formation[J].Applied physics letters,2007(18):181917-1-181917-3-0. |
[8] | Schweitz KO.;Bottiger J.;Matz W.;Schell N.;Chevallier J. .Hardness in Ag/Ni, Au/Ni and Cu/Ni multilayers[J].Philosophical Magazine.A.Physics of condensed matter, defects and mechanical properties,2001(8):2021-2032. |
[9] | Tsakalakos T;Hilliard J E .Elastic-Modulus in Composition-Modu- lated Copper-Nickel Foils[J].Journal of Applied Physics,1983,54(02):734-737. |
[10] | Junhua Xu;Masao Kamiko;Hidetaka Sawada;Yaomin Zhou;Ryoichi Yamamoto;Lihua Yu;Isao Kojima .Structure, hardness, and elastic modulus of Pd/Ti nanostructured multilayer films[J].Journal of Vacuum Science & Technology, B. Microelectronics and Nanometer Structures: Processing, Measurement and Phenomena,2003(6):2584-2589. |
[11] | A. Misra;J. P. Hirth;R. G. Hoagland .Length-scale-dependent deformation mechanisms in incoherent metallic multilayered composites[J].Acta materialia,2005(18):4817-4824. |
[12] | Wang, J.;Misra, A. .An overview of interface-dominated deformation mechanisms in metallic multilayers[J].Current opinion in solid state & materials science,2011(1):20-28. |
[13] | Lehoczky S L .Retardation of Dislocation Generation and Motion in Thin-Layered Metal Laminates[J].Physical Review Letters,1978,41(26):1814-1818. |
[14] | Lehoezky S L .Strength Enhancement in Thin-Layered A1-Cu Laminates[J].Journal of Applied Physics,1978,49(11):5479-5485. |
[15] | Misra A;Kung H .Defm~nation Behavior of Nanostructured Metallic Multilayers[J].Advances in Engineering Materials,2001,3(04):217-222. |
[16] | Daniels B J;Nix W D;Clemens B M .Enhanced Mechanical Hardness in Compositionally Modulated Fe( 001 )/Pt( 001 )Epitaxial Thin Fihns[J].Thin Solid Films,1994,253(1/2):218-222. |
[17] | Geisler H;Schweitz K O;Chevallier J .Hardness Enhancement and Elastic Modulus Behaviour in Sputtered Ag/Ni Multilayers with Different Modulation Wavelengtbs[J].Philosophical Maga- zine a-Physics of Condensed Matter Structure Defects and Mechani- cal Properties,1999,79(02):485-500. |
[18] | Wei XX;Song C;Geng KW;Zeng F;He B;Pan F .Local Fe structure and ferromagnetism in Fe-doped ZnO films[J].Journal of Physics. Condensed Matter,2006(31):7471-7479. |
[19] | R. G. Hoagland;R. J. Kurtz;C. H. Henager Jr. .Slip resistance of interfaces and the strength of metallic multilayer composites[J].Scripta materialia,2004(6):775-779. |
[20] | Wen S P;Zong R L;Zeng F et al.Evaluating Modulus and Hardness Enhancement in Evaporated Cu/W Muhilayers[J].Acta Materialia,200,55(01):345-351. |
[21] | Zhu, XY;Luo, JT;Chen, G;Zeng, F;Pan, F .Size dependence of creep behavior in nanoscale Cu/Co multilayer thin films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2010(1):434-440. |
[22] | Zhu X Y;Liu X Y;Zeng F.Mierostructure and Nanoin- dentation Hardness of Ag/Fe Multilayers[J].Transactions of Nonferrous Metals of Society of China,2010(20):110-114. |
[23] | Zhu X Y;Liu X J;Zong R L .Microstructure and Mechanical Properties of Nanoscale Cu/Ni Muhilayers[J].Materials Science and Engineering A:Structural Materials Properties Microstructure and Processing,2010,527(4/5):1243-1248. |
[24] | Zhu X Y;Luo J T;Zeng F.Microstructure and Ultrahigh Strength of Nanoscale Cu/Nb Muhilayers[J].Thin Solid Films,2011 |
[25] | Wen S P;Zong R L;Zeng F et al.Nanoindentation and Nano- scratch Behaviors of Ag/Ni Muhilayers[J].Applied Surface Science,2009,255:4558-4562. |
[26] | Wen SP;Zeng F;Gao Y;Pan F .Indentation creep behavior of nano-scale Ag/Co multilayers[J].Scripta materialia,2006(2):187-190. |
[27] | Wen SP;Zeng F;Gao Y;Pan F .Microstructure and nanoindentation investigation of magnetron sputtering Ag/Co multilayers[J].Surface & Coatings Technology,2006(3/4):1262-1266. |
[28] | S.P. Wen;R.L. Zong;F. Zeng;Y. Gao;F. Pan .Influence of plasticity mismatch and porosity on mechanical behavior of nanoscale Ag/W multilayers[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2007(1/2):38-43. |
[29] | S.P. Wen;R.L. Zong;F. Zeng .Nanoindentation investigation of the mechanical behaviors of nanoscale Ag/Cu multilayers[J].Journal of Materials Research,2007(12):3423-3431. |
[30] | Bauer E;Vandermerwe J H .Structure and Growth of Crystalline Superlattices - from Monolayer to Superlattice[J].Physical Review B,1986,33(06):3657-3671. |
[31] | Freund L B;Suresh S.Thin Film Materials[M].Cambridge:Cambridge University Press,2003 |
[32] | Misra A.;Hirth JP.;Kung H. .Single-dislocation-based strengthening mechanisms in nanoscale metallic multilayers[J].Philosophical Magazine.A.Physics of condensed matter, defects and mechanical properties,2002(16):2935-2951. |
[33] | Peter M. Anderson;John F. Bingert;Amit Misra .Rolling textures in nanoscale Cu/Nb multilayers[J].Acta materialia,2003(20):6059-6075. |
[34] | Verdier M;Fivel M;Gilles B .Some Investigations on the Effect of Layer Thickness in Muhilayer Metal Composites on Mechanical Properties[J].Advances in Engineering Materials,2001,3(08):597-601. |
[35] | J. Wang;R.G. Hoagland;J.P. Hirth .Atomistic modeling of the interaction of glide dislocations with "weak" interfaces[J].Acta materialia,2008(19):5685-5693. |
[36] | Jian Wang;Richard G. Hoagland;Amit Misra .Room-temperature dislocation climb in metallic interfaces[J].Applied physics letters,2009(13):131910-1-131910-3-0. |
[37] | Koehler J S .Attempt to Design a Strong Solid[J].Physical Review B,1970,2(02):547-551. |
[38] | Chert I W;Winn E J;Menon M .Application of Deformation lnstobility to Microstructural Control in Multilayer Ceramic Compos- ites[J].Materials Science and Engineering A:Structural Materials Properties Microstructure and Processing,2001,317:226-235. |
[39] | Low P G.Basic Principles of Plate Theory[M].Surrey University Press,1982 |
[40] | J. Wang;R.G. Hoagland;J.P. Hirth .Atomistic simulations of the shear strength and sliding mechanisms of copper-niobium interfaces[J].Acta materialia,2008(13):3109-3119. |
[41] | H.S.Kim;Y.Estrin .Plastic deformation behaviour of fine-grained materials[J].Acta materialia,2000(2):493-504. |
[42] | Harms U.;Schwarz RB. .Anomalous modulus and work function at the interfaces of thin films - art. no. 085409[J].Physical Review.B.Condensed Matter,2002(8):5409-0. |
[43] | A.C. Lewis;D. van Heerden;C. Eberl .Creep deformation mechanisms in fine-grained niobium[J].Acta materialia,2008(13):3044-3052. |
[44] | Bong C. Kang;Hee Y. Kim;Oh Y. Kwon .Bilayer thickness effects on nanoindentation behavior of Ag/Ni multilayers[J].Scripta materialia,2007(8):703-706. |
[45] | Zhu X Y;Liu X J;Zeng F et al.Room Temperature Nanoin- dentation Creep of Nanoscale Ag/Fe Multilayers[J].Materials Letters,2010,64:53-56. |
[46] | Sargent P M;Ashby M F .Indentation Creep[J].Materials Science and Technology,1992,8(07):594-601. |
[47] | O. PRAKASH;D. R. H. JONES .CREEP OF METAL-TYPE ORGANIC COMPOUNDS--II. INDENTATION CREEP[J].Acta materialia,1996(3):891-897. |
[48] | Mitlin D;Misra A;Mitchell TE;Hirth JP;Hoagland RG .Interface dislocation structures at the onset of coherency loss in nanoscale Ni-Cu bilayer films[J].Philosophical magazine: structure and properties of condensed matter,2005(28):3379-3392. |
[49] | David Mitlin;Amit Misra;Velimir Radmilovic;Michael Nastasi;Richard Hoagland;David J. Embury;J. P. Hirth;Terence E. Mitchell .Formation of misfit dislocations in nanoscale Ni-Cu bilayer films[J].Philosophical magazine: structure and properties of condensed matter,2004(7):719-736. |
[50] | W. Blum;X.H. Zeng .A simple dislocation model of deformation resistance of ultrafine-grained materials explaining Hall-Fetch strengthening and enhanced strain rate sensitivity[J].Acta materialia,2009(6):1966-1974. |
[51] | Mingxin Huang;Pedro E.J. Rivera-Diaz-del-Castillo;Olivier Bouaziz .Modelling the strength of ultrafine-grained and nanocrystalline fcc metals[J].Scripta materialia,2009(12):1113-1116. |
- 下载量()
- 访问量()
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%