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An in situ ex-environmental transmission electron microscopy (TEM) study was carried out to investigate the oxidation behavior of RESn(3) (RE = Nd, La, Ce) film in a room at 18 +/- 2 degrees C with 20 +/- 5% humidity. The original RESn(3) compounds transformed into RE(OH)(3) nanocrystals and Sn clusters. This involved the selective oxidation of RE in RESn(3) and the atomic diffusion of Sn atoms. The whole oxidation behavior was discussed from the thermodynamic viewpoint, and a reaction formula was proposed to summarize the oxidation of RESn(3) under different ambient conditions. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.