在高速钢基体上直流磁控溅射制备TiN/Si3N4纳米复合薄膜.用EDS、XRD、SEM、TEM、HRTEM等对薄膜的组织结构和形貌进行了表征.采用划痕仪和球-盘式摩擦仪分别测试了薄膜的结合力和在大气及真空中的摩擦学性能.结果表明,TiN/Si3N4复合薄膜由纳米TiN相镶嵌于非晶态Si3N4基体内构成.薄膜中Si含量的增加可抑制纳米TiN相的长大,降低薄膜摩擦系数,薄膜的摩擦学性能得到改善.溅射气压升高导致薄膜呈柱状结构,结合力下降,摩擦系数和磨损率上升.0.2Pa下制备含12.9at.%Si的TiN/Si3N4复合薄膜在潮湿空气和真空中均具有良好的摩擦学性能.
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