化学法增大铝箔表面阳极氧化膜介电常数的研究与进展

功能材料, 2005, 36(12): 1977-1980.

化学法增大铝箔表面阳极氧化膜介电常数的研究与进展

陈金菊 ^1, , 冯哲圣 ^2, , 郭红蕾 ^3, , 杨邦朝 ^4,

1.电子科技大学微电子与固体电子学院,四川,成都,610054

2.电子科技大学微电子与固体电子学院,四川,成都,610054

3.电子科技大学微电子与固体电子学院,四川,成都,610054

4.电子科技大学微电子与固体电子学院,四川,成都,610054

关键词：铝箔 , 电容量 , 复合氧化膜 , 阳极氧化 , 介电常数

Research and development of chemically increasing dielectric constant of anodic oxide film on aluminum

Keywords： aluminum foil , electric capacitance , composite oxide film , anodizing , dielectric constant

目前通过电化学方法增大铝阳极箔的有效表面积已越来越困难,铝电解电容器的阳极箔正面临一场新的技术革新:形成高介电常数的复合氧化膜来提高铝氧化膜的比容.本文对形成复合氧化膜的化学方法,复合氧化膜的生长机理,当前研究热点及形成复合氧化膜技术的未来发展进行了综合评述.

Now it is difficult to increase electric capacitance further by electrochemical etching to enlarge effective surface area S,and the anode foil of aluminum electrolytic capacitor is facing a new technological innovation in increasing relative dielectric constant εr of anodic oxide film. In this paper, the chemical fabricating methods, the growth mechanism of composite oxide films on aluminum, the focus of current research and prospective development about the technology of forming composite oxide films with high dielectric constant were reported.

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