离子渗金属中,工件表层合金贫化主要是由于离子轰击在工件表层造成一个严重的畸变层,畸变层原子具有高的扩散系数而非畸变层原子具有低的扩散系数,结果使交界区出现原子富集;同时在畸变层存在畸变梯度,这一梯度的存在支持这样的富集。离子轰击的溅射作用和溅射衰减也促使出现内层峰。提高源极电压和电流,增加单位时间内沉积到工件表面的金属原子数,或渗后进行高温扩散退火,都可以减轻和消除贫化。
In double glow plasma surface alloys, the depletion of some alloying elements in the surface layer was observed. Ion bombardment produced a seriously distorted layer beneath the sueface. The atom diffusivity in the distorted layer was higher than that in the undistorted layer. During diffusion process, the atoms gathered at interface of the distorted and undistorted layers. At the same time, the distortion gradient in the distortion zone supported this gathering. The sputtering and sputtering attenuation also promoted the generation of this inner peak of concentration. Mitigation or elimination of the depletion could be achieved by raising voltage and current of source plate, increasing metal atoms deposited on workpiece in unit time and carrying out high temperature diffusion after the plasma alloying.
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