近年来,ZnO基紫外探测器由于其优异的光电特性,已成为紫外探测领域研究中的新热点之一.介绍了近年来国内外不同结构类型的ZnO基紫外探测器的研究状况,并对影响探测器性能的ZnO的光电导特性、薄膜微结构、掺杂、金半接触等关键技术进行了探讨,指出推动ZnO紫外探测器实用化进程的关键在于制备高质量的掺杂薄膜以及进一步提高器件的量子效率.
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