采用退火和电子辐照相结合的复合工艺方法,对ZnGeP2晶体进行生长后处理.采用傅里叶红外光谱仪(FTIR)和高阻仪(HRM)等,对经不同次序的复合工艺处理前后样品的红外透过率和电阻率进行了测试.结果表明,采用先退火后电子辐照的复合处理工艺,样品的红外透过率能得到明显的提高.
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