采用溶胶-凝胶法,在玻璃基底上制备了掺杂不同质量分数Al的ZnO薄膜,并采用X射线衍射(XRD)仪、扫描电子显微镜(SEM)、紫外-可见光谱仪(UV-Vis)、光致发光光谱(PL)等方法测试和分析了不同Al掺杂浓度对ZnO薄膜的形貌结构、光学性能影响.结果表明,Al的掺杂引起了晶体生长过程中择优取向的改变,掺杂ZnO薄膜的表面颗粒随Al掺杂量的增加而增大,可见光范围内的平均透射率＞78%,光致发光光谱分析表明,纯的ZnO薄膜有很强的紫外发光,而随Al的质量分数的增加,紫外发光强度迅速下降.
参考文献
| [1] | 裴志亮,张小波,王铁钢,宫骏,孙超,闻立时.ZnO：Al（ZAO）薄膜的制备与特性研究[J].金属学报,2005(01):84-88. |
| [2] | Tark S J et al.[J].Journal of Materials Research,2009,19(05):259-264. |
| [3] | NIE DengPan,XUE Tao,ZHANG Yu,LI XiangJun.Synthesis and structure analysis of aluminum doped zinc oxide powders[J].中国科学B辑(英文版),2008(09):823-828. |
| [4] | Fortunato E;Barquinha P;Pimentel A et al.[J].Thin Solid Films,2005,487(1-2):205-211. |
| [5] | 傅竹西,林碧霞.氧化锌薄膜光电功能材料研究的关键问题[J].发光学报,2004(02):117-122. |
| [6] | Wei Shao;Ruixin Ma;Bin Liu .Fabrication and properties of ZAO powder, sputtering target materials and the related films[J].Journal of University of Science and Technology Beijing,2006(4):346-349. |
| [7] | K.J. Chen;T.H. Fang;F.Y. Hung;L.W. Ji;S.J. Chang;S.J. Young;Y.J. Hsiao .The Crystallization And Physical Properties Of Al-doped Zno Nanoparticles[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2008(18):5791-5795. |
| [8] | Liu H et al.[J].Current Applied Physics,2009,9(06):1217-1222. |
| [9] | Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices[J].Applied physics letters,2003(9):1875-1877. |
| [10] | Hyoun Woo Kim;Mesfin Abayneh Kebede;Hyo Sung Kim .Structural, Raman, and photoluminescence characteristics of ZnO nanowires coated with Al-doped ZnO shell layers[J].Current applied physics: the official journal of the Korean Physical Society,2010(1):60-63. |
| [11] | Kim H;Gilmore C M;Pique A et al.[J].Journal of Applied Physics,1999,86:6451-6456. |
| [12] | Fan XM;Lian JS;Guo ZX;Lu HJ .Microstructure and photoluminescence properties of ZnO thin films grown by PLD on Si(111) substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2005(2):176-181. |
| [13] | Zhao L;Lian JS;Liu YH;Jiang Q .Structural and optical properties of ZnO thin films deposited on quartz glass by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2006(24):8451-8455. |
| [14] | R.E. Marotti;C.D. Bojorge;E. Broitman;H.R. Canepa;J.A. Badan;E.A. Dalchiele;A.J. Gellman .Characterization Of Zno And Zno:al Thin Films Deposited By Thesol-gel Dip-coating Technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(3):1077-1080. |
| [15] | Maniv S;Westwood W D;Colombini E .[J].Journal of Vacuum Science and Technology,1982,20:162-170. |
| [16] | Gupta V.;Mansingh A. .INFLUENCE OF POSTDEPOSITION ANNEALING ON THE STRUCTURAL AND OPTICAL PROPERTIES OF SPUTTERED ZINC OXIDE FILM[J].Journal of Applied Physics,1996(2):1063-1073. |
| [17] | 陈猛,白雪冬,黄荣芳,闻立时.In2O3：Sn和ZnO：Al透明导电薄膜的结构及其导电机制[J].半导体学报,2000(04):394-399. |
| [18] | Kim H.;Horwitz JS.;Murata H.;Kafafi ZH.;Gilmore CM.;Chrisey DB.;Pique A. .Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):798-802. |
| [19] | 范志新,孙以材,陈玖琳.氧化物半导体透明导电薄膜的最佳掺杂含量理论计算[J].半导体学报,2001(11):1382-1386. |
| [20] | Yasuhiro I;Hirokazu K .[J].Applied Surface Science,2001,169:508-511. |
| [21] | Cullity B D.Elements of X-ray Diffractions[M].MA:Addition Wesley,Reading,1978 |
| [22] | 朋兴平,兰伟,谭永胜,佟立国,王印月.Cu掺杂氧化锌薄膜的发光特性研究[J].物理学报,2004(08):2705-2709. |
| [23] | 王卿璞;张德恒;薛忠营 等.[J].物理学报,2003,24:69-72. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%