硅片表面制备Ni68Co24P8化学镀层及其性能研究

表面技术 , 2012, 41(4): 10-12.

硅片表面制备Ni68Co24P8化学镀层及其性能研究

张含卓 ^1, , 孙宝珠 ^2, , 钟耀东 ^3, , 方亮 ^4,

1.中国矿业大学机电工程学院,徐州221116

2.中国矿业大学机电工程学院,徐州221116

3.中国矿业大学机电工程学院,徐州221116

4.中国矿业大学机电工程学院,徐州221116

基金项目: 中央高校基本科研业务费(2010QNA08)

关键词： Ni-Co-P镀层 , 化学镀 , 显微结构 , 腐蚀 , 磁性

Synthesis and Properties of Electroless Ni68Co24P8 Coatings on Silicon Substrates

在p型＜100＞单晶硅表面制备了Ni68Co24P8化学镀层,分析了镀层的显微结构、耐蚀性及磁学性质.结果表明:Ni68Co24P8镀层为非晶结构,表面均匀分布着直径约为0.5～4.2 μm的球状团簇;在10.0％ NaOH溶液和3.5％ NaCl溶液中,镀层表现出活化—钝化—过钝化的腐蚀行为,而在1.0％ H2SO4溶液中,镀层表面无法形成钝化膜,耐蚀性大幅下降;室温下,Ni68Co24P8镀层呈典型的软磁特征,饱和磁化强度为33.4 A·m2/kg.

参考文献

[1]	LEE W G;BROWAR E .Process of Chemical Nickel Plating of Amphoteric Elements and Their Alloys[P].U S,2928757,1960-03-15.
[2]	JUDGE J S;MORRISON J R;SPELIOTIS D E .Very High Coercivity Chemically Deposited Co-Ni Films[J].Journal of Applied Physics,1965,36(03):948-949.
[3]	Takanari Ouchi;Naofumi Shimano;Takayuki Homma .CoNiP electroless deposition process for fabricating ferromagnetic nanodot arrays[J].Electrochimica Acta,2011(26):9575-9580.
[4]	施冬梅,赵文轸,谢俊磊,杜仕国.化学镀对掺杂态聚苯胺粉体电磁性能影响分析与表征[J].表面技术,2011(04):8-10,22.
[5]	Deposition and characterization of electroless Ni-Co-P alloy for diffusion barrier applications[J].Microelectronic engineering,2010(3):387.
[6]	Liu WL;Chen WJ;Tsai TK;Hsieh SH;Chang SY .Effect of nickel on the initial growth behavior of electroless Ni-Co-P alloy on silicon substrate[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(8):3843-3848.
[7]	S. K. Murthy;J. K. Vemagiri;R. A. Gunasekaran .Electroless Deposition of Soft Magnetic CoNiP Thin Films[J].Journal of the Electrochemical Society,2004(1):C1-C7.
[8]	K. N. Srinivasan;T. Selvaganapathy;R. Meenakshi .Electroless deposition of nickel-cobalt-phosphorus nanoalloy[J].Surface Engineering,2011(1):65-70.
[9]	胡光辉,吴辉煌,杨防祖.硅表面直接化学镀镍研究[J].科学通报,2004(17):1711-1715.
[10]	J. N. Balaraju;V. Ezhil Selvi;V. K. William Grips;K. S. Rajam .Electrochemical studies on electroless ternary and quaternary Ni-P based alloys[J].Electrochimica Acta,2006(3):1064-1074.
[11]	Gao Y;Huang L;Zheng ZJ;Li H;Zhu M .The influence of cobalt on the corrosion resistance and electromagnetic shielding of electroless Ni-Co-P deposits on Al substrate[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(24):9470-9475.

上一张下一张

计量

下载量()
访问量()

作者相关

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

硅片表面制备Ni68Co24P8化学镀层及其性能研究

Synthesis and Properties of Electroless Ni68Co24P8 Coatings on Silicon Substrates

参考文献