设计了Au-Al键合点的温度冲击试验,分析了键合点的力学特性、结构形貌及电学性能.结果表明Au-Al键合界面无裂纹产生,且机械性能良好,键合拉力在3.0～12.0g之间;高温导致Au-Al间形成了电阻率较高的化合物Au5Al2;最终引起键合电失效.对目前工艺水平下的Au-Al键合可靠性进行了评价,发现其寿命分布服从威布尔分布规律.用图估法估算取置信度为95%时,特征寿命η为 547h,形状参数m为3.83.基于器件可靠性评价规律预测出了该工艺条件下制备的Au-Al键合寿命,取可靠度为90%时,试验样品在常温25℃时的寿命为1.8×105h,约20年.
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