利用磁控溅射方法,在MgO基底上沉积三元系铁电薄膜6%PMnN-94%PZT（6%Pb（Mn1/3,Nb2/3）O3-94%Pb（Zr0.45,Ti0.55）O3）,采用淬火方法对薄膜进行后期热处理。分别运用面内和面外X射线衍射（XRD）技术分析薄膜长相及晶体结构,运用高分辨率扫描电镜（SEM）观察薄膜的晶粒表面及截面结构。实验结果表明,所沉积薄膜为单晶钙钛矿结构薄膜,薄膜结构优良。
The ternary compound ferroelectric thin films,6% Pb（Mn1/3,Nb2/3）O3-94%Pb（Zr0.45,Ti0.55）O3（PMnN-PZT）,were deposited on the MgO substrates by the magnetron sputtering method,and the quench method was adopted for the post heat treatment.The out-plane and in-plane X-ray diffractions were used to characterize the crystal structure of the PMnN-PZT thin films,and the highly accurate scan electron microscope is used to observe the surface and the cross section surface of the thin films.It can be obtained that the PMnN-PZT thin films own single crystal structure and perovskite phase.
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