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综述了FRAM用铁电薄膜的疲劳机理,对比了钙钛矿结构铁电体与铋层类钙钛矿结构铁电体的区别,介绍了铋层类钙钛矿结构铁电材料的优良抗疲劳性能与该类铁电材料结构的密切关系,和为提高铋层类钙钛矿结构铁电薄膜Bi4Ti3O12的抗疲劳性能所采取的掺杂改性的研究现状,并针对目前铁电薄膜制备中存在的问题提出了今后研究需着重解决的关键问题.

参考文献

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