利用射频磁控溅射在玻璃衬底上制备了透明TiO2和TiO2-xNx薄膜样品,通过X射线衍射(XRD)、原子力显微镜(AFM)及UV-Vis分光光度计等测试手段表征了样品的结构、形貌和光催化性能.结果表明制备的薄膜为锐钛矿相结构.随着N2/Ar气流比的增大薄膜样品出现新的物相,吸收光谱向可见光方向展宽,在N2/Ar流量比为3:100时,制备的薄膜在可见光区具有很好的光催化性能.
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