为了获得性能良好的镍镀层并将其用于电真空器件,在瓦特镍体系镀镍过程中引入超声场电沉积.利用扫描电子显微镜(SEM)、激光共聚扫描显微镜(CLSM)、孔隙率测试、X射线衍射仪(XRD)、弯曲阴极法研究了超声波功率密度对镀镍层形貌、粗糙度、孔隙率、物相、内应力的影响.结果表明:超声可以有效消除镀镍层的针孔现象,当超声波功率密度小于0.24 W/cm2时,镀层结晶颗粒细小、致密、孔隙率相对较小;超声波功率密度增加,有利于镀层在(200)晶面上的生长,晶面择优取向由(111)向(200)晶面转变;超声可以降低镀层的内应力,不用超声时为280 MPa,超声波功率密度0.48 W/cm2时降至120 MPa左右.
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