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Effects of addition of CuO layers in L1(0)-type FePt thin films are investigated. The ordering temperature of L1(0)-type FePt films can be reduced by CuO addition. The coercivities of 0.78 and 0.82 T are achieved in [Pt(10 angstrom)/Fe( 14 angstrom)/CuO(2 angstrom)](10) film annealed at 550 degrees C for 20 min and [Pt(10 angstrom)/Fe(15 angstrom)/CuO(3 angstrom)](10) film annealed at 600 degrees C for 20 min, respectively, and these values are compared to the coercivity of 0.8T in [Pt(10 angstrom)/Fe( 13 angstrom)](10) film annealed at 650 degrees C. The thickness of Fe and CuO layers strongly in fluences the ordering temperature of L1(0)-type FePt and the magnetic properties of the films. The addition of CuO not only brings microstructure and surface morphology changes of FePt film, but also lowers the ordering temperature. (C) 2010 Elsevier B.V. All rights reserved.