采用磁控溅射方法在钛合金(Ti6A14V)基体上制备了HA(+YSZ)复合涂层.利用X射线衍射仪(XRD)分析涂层的物相组成,扫描电镜(SEM)观察涂层的表面形貌,原子力显微镜(AFM)分析涂层的生长状况,划痕法测定涂层与基体的附着力.结果表明,用磁控溅射法可在Ti6Al4V基体上制备HA(+YSZ)复合涂层,涂层组成与靶材基本相似,涂层呈多孔状,划痕法测量涂层的附着力约为80N,涂层的生长模式为层状生长加岛状生长.
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