SiCl4/H2辉光放电等离子体中电子特性的在线检测

功能材料, 2007, 38(10): 1599-1602.

SiCl4/H2辉光放电等离子体中电子特性的在线检测

祝祖送 ^1, , 林揆训 ^2, , 林璇英 ^3, , 邱桂明 ^4,

1.安庆师范学院,物理与电气工程学院,安徽,安庆,246011;汕头大学,物理系,广东,汕头,515063

2.汕头大学,物理系,广东,汕头,515063

3.汕头大学,物理系,广东,汕头,515063

4.汕头大学,物理系,广东,汕头,515063

基金项目: 安庆师范学院学科建设基金(044-K06016000007) 国家重点基础研究发展计划(973计划)(G2000028208)

关键词：加热Langmuir探针 , 电子特性 , 沉积速率 , SiCl4/H2等离子体

Experimental study of electron characteristics of SiCl4/H2 glow discharge plasma

SiCl4/H2混合气体被公认为低温沉积纳米晶以及多晶硅薄膜最具潜力的气源之一.首次利用加热可调谐Langmuir探针对等离子体增强化学气相沉积系统中的SiCl4/H2放电等离子体的电子浓度和电子平均能量进行了在线检测,并分析了电子特性随系统各参数:气体压强、射频功率及氢稀释度RH的变化规律.实验结果表明:随着气体压强的升高,电子浓度不断增大而电子平均能量不断减小;增大射频功率或减小氢稀释度RH,电子浓度和电子平均能量都相应增大.此外,并对实验结果进行了定性或半定量分析.本研究工作将有助于更好地理解SiCl4/H2放电机理,改善并优化沉积优质多晶硅薄膜的工艺参数.

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SiCl4/H2辉光放电等离子体中电子特性的在线检测

Experimental study of electron characteristics of SiCl4/H2 glow discharge plasma

参考文献