以锡盐和金属铟为原料采用胶体法制备ITO前驱物浆料,通过提拉法在镀有SiO2薄层的浮法玻璃基片上制备透明导电ITO薄膜.用TEM测定ITO前驱物浆料颗粒大小;用XRD、SEM、AES分别对ITO薄膜的结构和表面形貌进行表征;用分光光度计和四探针电阻仪检测ITO薄膜光电性能.结果表明:ITO前驱物浆料的颗粒粒径为2 nm～15 nm,具有较好的分散性和稳定性;ITO薄膜厚度越大,方电阻越小,平均透过率下降;ITO薄膜在波长为360 nm～800 nm区的透过率随膜厚增加有不同的影响;退火温度越高,膜方电阻越低;当膜厚为300 nm、退火温度600℃时,膜方电阻达到258Ω/□,其透过率在波长550 nm处达到89.6%,且薄膜表面平整.
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