采用室温磁控溅射技术在镁合金(AZ91D)表面制备出DLC/SiC(类金刚石/碳化硅)双层薄膜(SiC为中间层),研究了薄膜的纳米压痕行为、膜基黏附力和膜基系统的摩擦磨损性能.结果表明:DLC薄膜具有低的纳米硬度(3.05 GPa)、低的弹性模量(24.67 GPa)和高的硬弹比(0.122);膜基系统具有高的界面黏附力和好的摩擦磨损性能;在以氮化硅球为对摩件的室温干摩擦条件下其磨损速率在10~(-6)mm~3·m~(-1)·N~(-1)级,摩擦系数约为0.175.分析表明:膜基系统具有的良好抗磨性能与其薄膜具有高的塑性和硬弹比、膜基系统具有好的弹性模量匹配是相一致的;DLC薄膜具有的不寻常力学行为(很低的硬度和弹性模量等)与其基材是镁有关.
The nano-indentation, film-substrate adhesion and friction/wear properties of DLC/SiC (carbon nitride/silicon carbon) double layer thin film (SiC films as interlayer) deposited on Mg alloy (AZ91D) substrate using magnetron sputtering technique at room temperature were investigated. The results show that the DLC film exhibited a low nano-hardness (3.05 GPa) and Young's modulus (24.67 GPa) but a high ratio of hardness to modulus (0.124). The films-substrate system exhibited a good film-substrate adhesion and good friction/wear properties with the friction coefficient of about 0.175; the special wear rate was in the magnitude order of 10~(-6)mm~3·m~(-1)·N~(-1) together with little film cracking and interface delaminating when sliding against Si_3N_4 (silicon nitride) ball using ball-on-disc frictional and wear tester under dry frictional condition. The high wear-resistance is in accordance with the high ductility and hardness-to-modulus ratio of the DLC films and the good modulus match of the films-substrate systems. The unusual mechanical behaviors (very low hardness and modulus etc) of the DLC films are due to that the substrates are Mg alloy.
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