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研究了工艺参数对Ta/Cu真空扩散焊的影响.利用扫描电镜(SEM)、能谱分析(EDS)、显微硬度等测试方法对结合面微区进行了分析.结果表明:采用真空扩散焊工艺,在焊接压力为10 MPa及焊接时间为60 min的工艺参数下,界面孔洞随着焊接温度的升高而减少,在焊接温度达到1000℃时,结合面内孔洞基本消失,结合面扩散区域宽度为3~5 μm;加工硬化导致硬度升高,焊合区的硬度值要比未焊合区的硬度值稍高.

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