制备了摩尔比为l:1的TiO2和CeO2陶瓷靶材.采用射频磁控溅射法在O2和Ar比例为5:95的混合气体中制备了玻璃基TiO2-CeO2薄膜.溅射过程中,工作气压保持在1.8 Pa不变,玻璃基片温度从室温(RT)～220℃之间变化.用X射线衍射(XRD)、X射线光电子能谱(XPS)、扫描电镜(SEM)、透射电镜(TEM)和紫外-可见光谱仪研究了薄膜的物相结构、表面组成、表面形貌和镀膜试样的紫外-可见光透过率.结果表明,薄膜表面结构平滑、致密,呈微小晶粒结构,薄膜中Ti和Ce仅以Ti4+和Ce4+的形式存在;随着基片温度升高,薄膜中的细小晶粒略有长大;TiO2-CeO2镀膜玻璃可以有效地截止紫外线.
参考文献
| [1] | Sainz M A;Durán A;Fernández J M et al.[J].Journal of Non-Crystalline Solids,1990,121(1-3):315. |
| [2] | Takeshi Morimoto;Hiroyuki Tomonaga;Akemi Mitani .Ultraviolet ray absorbing coatings on glass for automobiles[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):61-65. |
| [3] | Hiromichi Sakamoto;Jianbei Qiu;Akio Makishima .The preparation and properties of CeO_2-TiO_2 film by sol-gel spin-coating process[J].Science and technology of advanced materials,2003(1):69-76. |
| [4] | Satoshi Takeda;Susumu Suzuki;Hidefumi Odaka;Hideo Hosono .Photocatalytic TiO{sub}2 thin film deposited onto glass by DC magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(2):338-344. |
| [5] | Hisashi Ohsaki;Yoshinori Kokubu .Global market and technology trends on coated glass for architectural, automotive and display applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(1/2):1-7. |
| [6] | Wanger C D;Biggs W M;Davis L E.Handbook of X-ray Photoelectron Spectroscopy[M].USA:Perkin-Elmer Corporation Physical Electronics Division,1979 |
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