为了研究化学气相沉积（CVD）金刚石薄膜生长过程中{100}织构的形成机理，采用x射线衍射、电子背散射衍射和扫描电镜研究了CVD自支撑金刚石薄膜的宏观织构、微区晶界分布和表面形貌。结果表明：金刚石薄膜以{111}面或{100}面为生长前沿面都能够形成{100}织构，但形成的表面形貌不同；通过吸附CH3-和CH3-在{111}面堆积碳原子时，通过{111}面的层层堆垛形成{100}面，且{100}面平行薄膜表面，暴露在晶粒表面的晶面只有{111}面；通过吸附CH2^2-在{100}面上堆积碳原子时，形成的{100}面平行于薄膜表面且作为晶粒大部分表面，晶粒显露的侧面为{111}面。
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