TiO2是响应三甲胺(TMA)气体最佳的金属氧化物半导体材料,为保持TiO2基TMA旁热式气敏器件具有较高灵敏度和较低空气阻值(Ra),相应降低器件加热功率RH,本文通过N2气氛高温退火、高价Nb5+掺杂和长时间烧结等方法,提高TiO2基敏感材料电导率获得成功。实验与理论证明:降低氧分压可增强TiO2自身半导化程度;掺入10%左右Nb2O5,Nb5+替代Ti4+形成固溶体,可使TiO2得到最佳半导化效果;采用长时间的烧结处理,促使Ti3+转化为Ti4+,进一步提高材料电导率和器件稳定性,从而为制造低阻、高灵敏度、高选择性动物食品测鲜传感器开辟了一条新途径。
Titanium is a premium metal-oxide material sensitive to trimethylamine (TMA) gas. To obtain high
sensitivity and low power of elements, annealing in N2, doping with Nb5+ and long-time sintering were applied to improve the conductivity
of TiO2-based sensitive materials. It is concluded that low oxygen pressure can enhance self-semiconductorization. Doping with 10% Nb5+
that substitutes for Ti4+ and long-time sintering that promotes conversion from Ti3+ to Ti4+ can improve conductivity of material and
stability of elements. As a result, a new method is procured to make low-resistance sensor with high sensitivity and good selectivity.
参考文献
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