先利用电阻加热真空蒸发法制备(101)和(002)优先取向的金属Zn薄膜,而后氧化处理制备ZnO薄膜.并对制备的ZnO薄膜进行了XRD,SEM,紫外-可见光吸收谱和光致发光(PL)分析.XRD结果显示制备的ZnO薄膜中有未完全氧化的金属Zn.吸收谱结果发现未完全氧化的ZnO薄膜具有强烈的紫外吸收.PL谱结果显示该法制备的ZnO薄膜具有很高的PL强度,而且(101)前驱金属膜制备的ZnO比(002)前驱金属膜制备的试样具有更高的PL强度.未完全氧化的Zn所形成的缺陷是PL强度较高的原因,SEM结果显示的ZnO薄膜表面粗糙度较大引起强烈的紫外吸收也是激发光强度高的原因之一.
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