采用微波液相沉积法(MWLPD),在低温下制备出了性能优异的锐钛矿型TiO2薄膜.通过XRD、SEM分析手段研究了薄膜和粉体的结晶度、晶粒尺寸、表面形貌等.实验结果表明,所得薄膜不仅具有良好的结晶形貌、表面形貌及可见光透过率,还具有特殊的表面凸起结构,能有效提高薄膜的比表面积,有助于提高TiO2薄膜的光催化性能.且整个制备过程无需热处理,成膜周期短,效率较高.
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