材料期刊网

TEM的实验观察表明:O~+注入前,Al薄膜是面心立方结构的多晶体,其晶粒大小为200—600(■)。注入后,Al薄膜晶粒随着O~+注入剂量的增加而明显细化,当O~+注入剂量达到1×10~(17)ion/cm~2时,Al薄膜晶粒细化成19—40(■),此时晶态特征的电子衍射环退化成漫散的晕轮,这说明Al薄膜长程有序消失,转变成短程有序状态,即从晶态过渡到非晶态。ESCA得出这种非晶物质是Al_2O_3。

TEM was employed to study the transition from crystalline Al to amorphous state Al_2O_3 by O~+-implantation. The structural feature of the thin film specimen appears to be fcc polycrystals between 200 to 600(■) and to refine obviously during O~+ implanting. The refinement may be down to 19-40(■) when the increasing of the dose of O~+-implanted up to 1×10~(17) ion/cm~2. The diffraction pattern becomes the faint diffuse scattering ring, i.e., an enough evidence of the order-disorder transition or the amorphous formation is given. ESCA has identified that the amorphous substance is Al_2O_3.