本文用椭圆术对1Cr18Ni9Ti 钢的钝化膜的生长性质进行了研究,并对这种极薄钝化膜(吸收膜)的椭圆仪参数(Δ,Ψ)的一些特性进行了计算分析。分析结果表明,该钝化膜厚度约50,生长过程满足对数规律。结果还表明,钝化膜生长过程中伴随着结构的变化,该钝化膜可以看成是光学性质逐渐变化的复层膜。本文的研究说明,在不锈钢极薄钝化膜的厚度、生长规律及生长过程中结构变化的研究方面,椭圆仪是一种非常有用的分析手段。
The formation of passive film on 1Cr18Ni9Ti steel surface was studied with an ellipsometer.Some features of ellipsometer parameters(△,Ψ)of this very thin passive film(absorbing film)were studied in detail. Analytical results showed that the thickness of the passive film was about 50 and that film growth conformed to logarithmic relation.It was also found that the structure of the passive film changed with increased thickness. In fact,this film assumes a multi-film structure whose optical properties ch- ange gradually along the direction of stratification,
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