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采用磁控共溅射方法在n型Si(100)基片上制备了一系列具有不同Co含量(x,at%)的Co掺杂非晶C颗粒薄膜,溅射温度为室温.研究了Co-C颗粒薄膜的微结构,磁输运特性及磁性能.通过优化Co含量,在低温下发现了较大的负磁电阻(MR).温度为2K、磁场为90×79.6 kA.ml时,Co含量为6.4 at%的Co-C薄膜的负磁电阻值最大,达到27.6%.随着Co含量从6.4 at%增加至16.4 at%,MR 值从27.6%逐渐减小至2.2%.电阻率ρ随温度T的变化曲线显示了线性的lnρ-T1/2关系,说明样品中电子传导遵循隧穿输运机制.

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