Sol-gel生长KTa_(1-x)Nb_xO_3电光薄膜的成分和结构

材料研究学报, 1995, 9(2): 158-162.

Sol-gel生长KTa_(1-x)Nb_xO_3电光薄膜的成分和结构

湖北大学

武汉工业大学

基金项目: 国家自然科学基金

关键词：钽铌酸钾(KTN)薄膜 , valence state. XPS , sol-gel , KTN thin film. Ar~+ sputtering

XPS STUDY OF THE COMPOSITION AND STRUCTURE OF KTN ELECTROOPTIC THIN FILMS FORMED BY SOL-GEL PROCESS

LU Chaojing , WANG Shiming , KUANG Anxiang , HUANG Guiyu , WANG Longhai (Hubei University)WANG Dianfen(Wuhan University ofTechnology)(Department of Physics , Nanjing University

Keywords： : chemical composition , X射线光电子能谱(XPS) , 溶胶-凝胶法(sol-gel) , Ar￣+溅射

采用XPS方法研究了sol-gel工艺制备的KTN(x=0.35)薄膜的成分和结构.结果表明,除了表面被碳污染外,薄膜中无残余的碳和其他杂质.其成分与原料的化学计量比相近,且沿深度均匀分布.各元素的化学状态证实薄膜系钙钛矿型KTN结构.Ar+溅射后的XPS谱反映K严重偏低,Ta和Nb的化学状态改变,是Ar+轰击引起K择优溅射及化合物分解所致.

Epitaxial KTN (x=0.35) eletrooptic thin films were formed on (100) SrTiO3 substrates by sol-gel process.In this peper, wide and narrow scans of XPS analyses were studied on the surface of KTN thin films before and after Ar+ SPuttering for 10min. The resul

参考文献

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材料期刊网

Sol-gel生长KTa_(1-x)Nb_xO_3电光薄膜的成分和结构

XPS STUDY OF THE COMPOSITION AND STRUCTURE OF KTN ELECTROOPTIC THIN FILMS FORMED BY SOL-GEL PROCESS

参考文献