p型透明导电氧化物CuAlO2薄膜的研究进展

材料导报, 2007, 21(3): 115-118.

p型透明导电氧化物CuAlO2薄膜的研究进展

李军 ^1, , 兰伟 ^2, , 张铭 ^3, , 董国波 ^4, , 严辉 ^5,

1.北京工业大学材料学院薄膜实验室,北京,100022

2.北京工业大学材料学院薄膜实验室,北京,100022

3.北京工业大学材料学院薄膜实验室,北京,100022

4.北京工业大学材料学院薄膜实验室,北京,100022

5.北京工业大学材料学院薄膜实验室,北京,100022

基金项目: 国家自然科学基金(60576012) 北京市高校拔尖创新人才计划项目(20041D0501513)

关键词：透明导电氧化物(TCO) , p型TCO , CuAlO2薄膜

Research Progress in p-type Transparent Conductive Oxide CuAlO2 Thin Film

透明导电氧化物(TCO)的出现开拓了光电子器件研究的新领域.但p型TCO的相对匮乏严重制约了透明氧化物半导体(TOS)相关器件的开发与应用.CuAlO2作为一种天然的p型TCO成为近年来p型TCO的研究热点.介绍了p型TCO的研究现状,综述了不同制备方法制备p型CuAlO2薄膜的研究进展,以及在器件方面的应用,并对其前景进行了展望.

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材料期刊网

p型透明导电氧化物CuAlO2薄膜的研究进展

Research Progress in p-type Transparent Conductive Oxide CuAlO2 Thin Film

参考文献