采用离子注入法研究了Co离子注入ZnO晶体的光致发光效应.对离子注入后的样品在Ar气保护下进行退火处理,退火温度为700℃,退火时间为10 min,在其光致发光谱中观察到了406和370 nm的紫光发射峰.对比了Co,Cu离子分别注入的ZnO晶体的光致发光谱,观测到二者的光致发光谱类似.同时,研究了Co离子注入剂量对样品发光性质的影响,结果表明随注入剂量的增加绿色发光中心逐渐向低能边偏移,分析认为绿色发光中心的偏移与离子注入后ZnO晶体的禁带宽度发生改变相关.
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