微电子集成技术的快速发展对封装材料提出了更高的要求.在传统封装材料已不能满足现代技术发展需要的情况下,新型硅基铝金属复合材料脱颖而出,以其优异的综合性能成为备受关注的焦点.高体积分数硅基体带来的低热膨胀系数能很好地与芯片相匹配,连通分布的金属(铝)确保了复合材料的高导热、散热性,两者的低密度又保证了复合材料的轻质,尤其适用于高新技术领域.重点探讨了硅基铝金属铝复合材料的主要制备技术及其组织性能机理,并对其未来发展作出展望.
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