内置式微型电液动力泵的研究

工程热物理学报 , 2008, 29(10): 1743-1745.

1.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

2.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

3.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

基金项目: 国家自然科学基金(50676001)

THE EXPERIMENTAL STUDY OF ELECTROHYDRODYNAMIC MICROPUMP

本文介绍了一种新型电子冷却技术-微型电液动力泵的工作原理,并且运用了MEMS技术,在硅片上加工了梳状电极形式的微型电液动力泵.采用直流电压驱动对HFE7100进行了相关实验研究,取得良好效果.

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