介绍了在原子力显微镜（AFM）轻敲模式下使用普通硅针尖在球形结构的苯乙烯-乙烯/丁烯-苯乙烯三嵌段共聚物（SEBS）薄膜表面锻造凹痕和凸痕纳米图案的工艺方法;从嵌段共聚物薄膜的微观结构出发,研究了SEBS薄膜表面的不同相分离形态对锻造压痕的影响,结果证实,只有六角状球形结构的薄膜才能用于制备压痕,其原因是由于该结构样品具有较低的硬度和模量;通过与均聚物PS薄膜比较得出,球形相分离形态的SEBS薄膜具有容易发生变形、压痕精度高、无边界堆积等优点。
The fabricating method for hammering imprint and embossed nano-patterns in polystyrene- block-poly （ethylene/butylenes）-block-polystyrene triblock copolymer （SEBS） thin film was introduced by using atomic force microscope （AFM） tip in tapping mode. Based on the microstrueture of SEBS block copolymer thin film, the influence of different phase separation morphologies on the hammering patterns was studied in detail. The conclusion shows that only the film with well-ordered hexagonal polystyrene（PS） spherical structure can be used to generate patterns freely, which were due to for the lower hardness and modulus of the sample. Comparing with the PS film of non-phase separation by the same hammering method, the spherical SEBS film has many advantages such as easy to deform, high resolution and without edge debris etc.
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