介质铁电超晶格薄膜是一类新型的薄膜材料,已逐渐开始受到重视,成为研究的热点.本文主要分析了铁电超晶格薄膜的结构特点、组分材料、介电铁电性能;介绍了其在实际中的应用以及在近几年的发展;概括了几种常用的介质铁电超晶格薄膜的生长技术及其影响因素;最后对铁电超晶格薄膜的发展和应用前景进行了展望.
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