利用APCVD方法在浮法玻璃表面沉积了TiO2薄膜,并用XRD和AFM分别研究了不同沉积温度下薄膜的晶型结构以及表面形貌.结果表明,随着沉积温度的升高,薄膜的晶型逐渐由无定形态转变为锐钛矿和金红石,薄膜的表面平均粗糙度逐渐变大.
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