用金属有机物分解(MOD)以及sol-gel方法制备了SrBi2Ta2O9(SBT)铁电薄膜.经测量在750℃晶化的SBT薄膜具有很好的铁电性能.通过对SBT样品极化反转过程进行测试,得到了外加电压(0.5~5V)与SBT薄膜的开关时间(100~600ns)及极化反转电荷的关系.并研究了不同气氛下退火对SBT铁电薄膜开关特性的影响.
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