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用sol-gel法成功制备了Bi3.15Nd0.85Ti3O12铁电薄膜,XRD结果表明制备的BNT薄膜具有(117)和(00l)的混合取向,FE-SEM显示薄膜表面光滑致密,颗粒均匀.剩余极化Pr和矫顽场Ec分别为29.5μC/cm2和100kV/cm,经过109次循环后几乎无疲劳.

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