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为了探讨2,2’-联吡啶稳定剂对化学镀铜层微应力、晶格常数和动力学过程的影响,研究了化学镀铜的动力学过程和甲醛、Cu“的电化学反应,采用X射线衍射(XRD)和扫描电子显微镜(SEM)表征了镀层性能。结果表明:微量2,2’-联吡啶能促进反应,浓度进一步提高会阻碍反应的进行;随着2,2’-联吡啶的加入,沉积电位正移,沉积速率下降,该变化趋势与测试的结果一致;随着2,2’-联吡啶的加入,镀层的电阻率降低,而其微应力略有增加;镀层晶格常数与2,2’.联吡啶浓度无关。综合考虑溶液镀速、镀层形貌、电阻率和微应力,获得高性能化学镀铜层的最佳2,2’-联吡啶浓度为4mg/L。

参考文献

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