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CoNiFe alloys have been prepared by means of pulse-reverse electroplating technique. The effects of the electroplating variables on the deposition of CoNiFe alloys have been investigated by the Taguchi orthogonal array experiment coupled with response surface methodology. The results show that the concentrations of Co2+, Fe2+ and Ni2+ ions, bath temperature, cathodic peak pulse current, and rotating speed influence the composition of CoNiFe electrodeposits. A theoretical analysis of the alloy-plating shows that the anomalous co-deposition of iron-group metals mainly originate from differences in their atomic radii, which results in the differences in the stability and electrochemical reduction rate between their monohydroxide ions. A deposit with a composition of Fe30.50Co64.49Ni5.01 possesses high saturation magnetic flux density and can meet requirements of future micro-electro-mechanical systems.

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