用溶剂蒸发法将单分散SiO2微球组装成三维有序结构的胶体晶体模板,用低压化学气相沉积法填充高折射率材料硅,酸洗去除SiO2模板,获得了硅反蛋白石三维光子晶体.通过扫描电镜、X射线衍射仪和紫外-可见-近红外光谱仪对硅反蛋白石三维光子晶体的形貌、成分、结构和光学性能进行了表征.研究结果表明:Si在SiO2微球空隙内具有较高的结晶质量,填充致密均匀;通过控制沉积条件,可控制硅的填充率;制备的硅反蛋白三维光子晶体在近红外区(1.4μm左右)具有明显的光学反射峰,表现出光学带隙效应,测试的光学性能与理论计算基本吻合.
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