通过在平栅型基板上,分别溅射氧化铋薄膜和氧化锡薄膜,形成阴极场发射阵列,并在阴极和栅极之间加载脉冲电流,使阴栅级之间的薄膜形成裂缝,并进行场致发射性能测试,测试结果表明,平栅型双层膜发射器件的开启电压随阳极电压增加而降低.在阳压为3000 V,隔离子高度为500 μm时,平栅型双层膜场发射器件的开启电压为110 V,在栅压为110 V时的发射效率为1％左右,随着栅压的增大,发射效率逐渐减小.该双层膜阴极具有均匀的发射性能、良好的栅控能力以及场发射特性.
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