随着半导体技术的飞速发展,作为硅基集成电路核心器件的MOSFET的特征尺寸正以摩尔定律的速度缩小.然而,当传统栅介质层SiO2的厚度减小到原子尺寸时,由于量子隧穿效应的影响,SiO2将失去介电性能,致使器件无法正常工作.因此,必须寻找新的高介电常数材料来替代它.目前,高介电常数材料是微电子行业最热门的研究课题之一.主要介绍了栅介质层厚度减小所带来的问题(即研究高介电常数材料的必要性)、新型栅电介质材料的性能要求,并简要介绍和评述了近期主要高介电常数栅介质材料的研究状况及其应用前景.
参考文献
| [1] | KingAI;Maria J P et al.[J].Nature,2000,406:1032. |
| [2] | TheNationalTechnologyRoadmapforSemiconductors.Ed Semiconductor Industry Assocation[J].San Jose,1999 |
| [3] | VenkateswarluP;Bharadwaja S S N;Krupanidhi S B .[J].Thin Solid Films,2001,389:84. |
| [4] | MoonK;Ishiwara H;Tolumitsu E et al.[J].Thin Solid Films,2001,385:307. |
| [5] | WilkGD;Wallace R M .[J].Applied Physics Letters,2000,76(01):112. |
| [6] | QiWJ;Nieh R;Easwar D et al.[J].Applied Physics Letters,2000,77(11):1704. |
| [7] | GuptaJA;Landheer D;Mcaffrey J P .[J].Applied Physics Letters,2001,78(12):1718. |
| [8] | MaY;Ono Y;Hsu S T .[J].Materials Research Society Symposium Proceedings,1999,567:355. |
| [9] | 韩德栋,康晋锋,林长海,韩汝琦.Annealing characteristics of ultra-thin high-K HfO2 gate dielectrics[J].中国物理(英文版),2003(03):325-327. |
| [10] | QingLu;Hideki Takeuchi;Ronald Lin.Hot Carrier Reliability of n-MOSFET With Ultra-thin HfO2 Gat e Dielectric and Poly-Si Gate IEEE 40th Annual international Reliability Physics Symposium[M].,2002:429. |
| [11] | PerkinsCM;Triplett B B;Mclntyre P C et al.[J].Applied Physics Letters,2001,78(16):2357. |
| [12] | JeonTS;White M;Kwong D L et al.[J].Applied Physics Letters,2001,78(03):368. |
| [13] | KwoJ;Hong M Y;Chin A .[J].Journal of Applied Physiology,2001,89(07):3920. |
| [14] | StemmerS;Maria J P;Kingon A L et al.[J].Applied Physics Letters,2001,79(01):102. |
| [15] | WuYH;Yang M Y;Chin A et al.[J].IEEE Transactions on Electron Devices,2000,21(07):341. |
| [16] | 王东生,于涛,游彪,夏奕东,胡安,刘治国.高介电常数的栅极电介质LaAlO3薄膜的性能研究[J].无机材料学报,2003(01):229-232. |
| [17] | Lu XB.;Liu ZG.;Wang YP.;Yang Y.;Wang XP.;Zhou HW.;Nguyen BY. .Structure and dielectric properties of amorphous LaAlO3 and LaAlOxNy films as alternative gate dielectric materials[J].Journal of Applied Physics,2003(2):1229-1234. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%