用射频磁控溅射法制备了锗/氧化硅纳米多层膜,在室温下测量了Au/锗/氧化硅纳米多层膜/pSi结构的电致发光.利用位形坐标模型分析了锗/氧化硅纳米多层膜的发光中心,并用量子限制-发光中心模型对该纳米结构的电致发光过程作了研究,研究表明锗/氧化硅纳米多层膜的电致发光主要来自SiO2层的发光中心.
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