低氟溶胶-凝胶法制备Φ76.2mmYBCO薄膜

1.西安理工大学,陕西,西安,710048

2.西安理工大学,陕西,西安,710048

3.西安理工大学,陕西,西安,710048

4.西安理工大学,陕西,西安,710048

基金项目: 西安应用材料创新基金(XA-AM-200611) 国家自然科学基金(50772088)

Preparation of φ76.2 mm Thick YBCO Films by Low-Fluorine Sol-Gel Process

采用低氟溶胶-凝胶法在Φ76.2 mm的LaAlO3(LAO)单晶衬底上制备YBCO薄膜,然后对Φ76.2 mm的YBCO薄膜样品的微观结构、膜厚及超导性能进行均匀性测试分析.结果表明:所制备的薄膜厚度均匀并具有较好的c轴外延生长取向和均匀的超导电性能.

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