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The chemical states of oxygen implanted in SUS304 stainless steel and pure metals (Fe,Ni,Cr) by O-2(+) ion bombardment have been investigated by means of X-ray photoelectron spectroscopy (XPS) using synchrotron soft X-ray. For SUS304, all of implanted oxygen is chemically combined with the constituent metals, forming metallic oxides. For pure metals, on the other hand, only a part of implanted oxygen react with the target metals. The other part of the implanted oxygen in pure metals does not react with the target, and they are inserted into the crystal lattice (we call them as "dissolved oxygen"). The ratio of "dissolved oxygen" to the reacted oxygen depends on the chemical reactivity of target metals. (C) 2000 Kluwer Academic Publishers.

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