采用多弧离子镀在AISI M2高速钢(HSS)上沉积了TiN硬涂层,试样中基体厚度为1 mm,涂层厚度分别为3.0、5.0、7.0、9.0和11.0μm.应用X射线衍射(XRD)分析了TiN涂层中残余应力,测量了TiN(220)衍射晶面在五种不同倾斜角(ψ=0°,20.7°,30°,37.8°和45°)下的X射线衍射蜂.结果表明:在3-11μm涂层厚度范围内,TiN涂层中均表现出残余压应力且残余压应力值较大.TiN涂层中残余应力大致分布在-3.22~-2.04 GPa之间,本征应力分布在-1.32~-0.14 GPa,热应力约为-1.86~-1.75 GPa.TiN涂层中残余应力值随涂层厚度变化是非线性增加的,随厚度增加表现出先增大后减小的变化趋势,多项式拟合后发现约在8.5μm厚时残余应力达到最大值.
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