将用IAD法在CAB玻璃基体上沉积的SiO_2薄膜在600℃条件下部分进行退火,然后在不同湿度气氛中进行老化处理.利用分光光度计、纳米硬度计和扫描电镜研究了退火处理及不同老化气氛对SiO_2薄膜的光谱性能、硬度及摩擦性能的影响.实验结果如下:虽然退火和老化方式影响SiO_2薄膜的结构,但不同处理的SiO_2膜层表面摩擦系数均小于CAB玻璃基体,退火处理后的SiO_2薄膜硬度高于不退火处理的SiO_2薄膜硬度;SiO_2薄膜在可见光区内对CAB玻璃能够起到有效的增透作用;退火处理后红外透过率提高.实验结果表明CAB玻璃表面镀SiO_2薄膜在不损害光谱性能的同时可以起到有效地防护作用,显著提高其耐摩性能.
The SiO_2 thin film deposited on CAB glass substrate by the means of physical vacuum deposition technology was annealed 600 ℃, then the SiO_2 thin film's mechanical property, optical quality and facial morphology were investigated after 20 d aging time under different atmospheres. The results are followed: annealing and aging atmosphere have effects on the properties of SiO_2 thin film's configuration changed, but all the thin films' fraction coefficient is lower than CAB glass substrate, the annealed thin films' hardness is higher than the un-annealed thin films'; The thin film effectively anti-reflect in the visible range, after the annealed treatment, IR transmission is improved. The results showed the SiO_2 thin film can effectively protect the CAB glass from scratch, on the basis of increasing transmission in the range of visible light.
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