综述了用溶胶-凝胶法制备多孔SiO2薄膜过程中薄膜开裂问题的研究进展,讨论了影响薄膜开裂的各种因素.对各种可能导致开裂的因素如溶剂、化学添加剂、表面改性、干燥过程等进行了开裂原理分析,并给出了部分解决方法.
参考文献
| [1] | Liu Yun;Ren Wei et al.New method of making porous SiO2 thin films[J].Thin Solid Films,1999,353:124. |
| [2] | Griffin A J Jr;Brotzen F R .Effect of thickness on the transverse thermal conductivity of thin dielectric films[J].Journal of Applied Physics,1994,75(08):3761. |
| [3] | I. Fisher;W. D. Kaplan;M. Eizenberg .Dielectric property-microstructure relationship for nanoporous silica based thin films[J].Journal of Applied Physics,2004(10):5762-5767. |
| [4] | Jo MH.;Kim DJ.;Hyun SH.;Choi SY.;Paik JT.;Park HH. .SIO2 AEROGEL FILM AS A NOVEL INTERMETAL DIELECTRIC[J].Journal of Applied Physics,1997(3):1299-1304. |
| [5] | Zarzycki et al.Synthesis of glasses from gel.The problem of monolithic gels[J].Journal of Materials Science,1982,17:3371. |
| [6] | Uchida N et al.Chemical effects of DCCA tO the sol-gel process[J].Journal of Materials Science,1994,29:5188. |
| [7] | Adachi T et al.Sintering of silica gel derived from the alkoxysilane solution containing N,N-dimethylformamide[J].Journal of Non-Crystalline Solids,1988,100:250. |
| [8] | Roman N K;Brinker C J .Structure-property relationships in thin films and membranes[J].Journal of Membrane Science,1995,105:273. |
| [9] | 李智,姚熹,张良莹.sol-gel法制备多孔纳米SiO2薄膜[J].电子元件与材料,2005(02):32-34,37. |
| [10] | Jung SB.;Park HH. .Control of surface residual -OH polar bonds in SiO2 aerogel film by silylation[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(0):503-507. |
| [11] | 王娟,张长瑞,冯坚.三甲基氯硅烷对纳米多孔二氧化硅薄膜的修饰[J].物理化学学报,2004(12):1399-1403. |
| [12] | 何志巍,甄聪棉,兰伟,王印月.溶胶-凝胶法制备纳米多孔SiO2薄膜[J].物理学报,2003(12):3130-3134. |
| [13] | Hench L L;West J K .The sol-gel process[J].Chemical Reviews,1990,90:33. |
| [14] | Twari P H;Hunt A J;Lofftus K D .Ambient-temperature supercritical drying of transparent silica aerogels[J].Materials Letters,1985,3(9-10):363. |
| [15] | Okuzaki S .Development and characterisation of polypyrrole composites[J].Journal of the American Chemical Society,1998,167:12896. |
| [16] | 马建华,吴广明,沈军,王珏.溶胶-凝胶法制备SiO2-TiO2纳米复合薄膜紫外光处理的研究[J].无机材料学报,2001(06):1174-1180. |
| [17] | Hyun SH.;Kim GS.;Park HH.;Kim TY. .Synthesis of low-k porous silica films via freeze drying[J].Journal of Materials Science Letters,2000(20):1863-1866. |
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